By Humberto Campanella
This groundbreaking ebook offers you a complete knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time wherever, you discover huge insurance of those units at either the expertise and alertness degrees. This functional reference provides you with counsel in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with regular CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their software to sensing and RF platforms. additionally, this one-stop source seems to be on the major features, adjustments, and obstacles of FBAR, MEMS, and NEMS units, assisting you to decide on the fitting methods in your tasks. Over 280 illustrations and greater than a hundred thirty equations help key themes through the publication.
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Additional info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)
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Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) by Humberto Campanella